Description
The KOKUSAI BALEXT-SMP is a high-performance semiconductor manufacturing equipment designed to meet the demands of the ever-evolving semiconductor industry.
Product Description
The KOKUSAI BALEXT-SMP is a single wafer wet cleaning system that offers superior cleaning performance, reliability, and flexibility to meet the needs of the semiconductor manufacturing processes. The system features advanced technologies such as a double-sided, high-pressure spray cleaning method that ensures maximum cleaning efficiency and uniformity. The system also features a fully automated process flow that reduces operator intervention, increases throughput, and improves process repeatability.
Product Parameters
- Wafer size: 200mm or 300mm
- Chemicals: up to 5 types
- Chemical flow rate: 1 to 200 ml/min
- Cleaning time: 1 to 3600 sec
- Cleaning sequence: up to 3 steps
- DI water flow rate: 1 to 5 L/min
- DI water temperature: 10 to 60 degrees Celsius
- Process temperature control range: 10 to 80 degrees Celsius
- Chemical concentration control range: 1 to 30%
Specifications
- Dimensions (W x D x H): 1240 x 1100 x 1940 mm
- Weight: 550 kg
- Power supply: 3-phase AC 200/208/220/240 V +/- 10% 50/60 Hz
- Power consumption: 5 kVA
The KOKUSAI BALEXT-SMP is an ideal choice for advanced semiconductor manufacturing facilities that require high-performance and reliable cleaning equipment.
All prices listed on the official website are subject to confirmation by contact: Wu Jiedong (manager).
Our product: brand new original packaging
Our warranty: All new or repaired parts have a 12 month warranty period beginning
Our payment: 100% telegraphic transfer of inventory items before shipment, conditions can be proposed!
If you have any downtime spare parts that you cannot find, please feel free to call or use email to contact me. If there are issues that the product cannot solve, please contact me. Product prices can be negotiated. Please do not consider contacting me!
