Description
The KOKUSAI KOMS-A2 is a high-performance semiconductor etching machine designed for use in the manufacturing process of semiconductor devices. It is built with advanced technology and features that ensure precision, reliability, and efficiency in the etching process.
Product Description
The KOMS-A2 is a fully automated and computer-controlled etching machine that delivers high-precision etching results. It features a unique gas distribution system that ensures uniformity in the distribution of etching gas, resulting in high-quality etching. The machine is equipped with a quartz chamber that is resistant to high temperatures and corrosive chemicals, making it ideal for use in the semiconductor manufacturing process.
The KOMS-A2 is designed with safety in mind, featuring an interlock system that prevents the machine from operating unless all doors are securely closed. Additionally, it is equipped with an emergency stop button that can be used to immediately stop the machine in case of an emergency.
Product Parameters
- Power supply: AC 200/220V ±10%, 50/60Hz
- Power consumption: 5kVA
- Etching method: Dry etching (RIE)
- Substrate size: Up to 6 inches
- Gas supply: 4 channels (CF4, O2, Ar, N2)
- Etching rate: Up to 300nm/min
- Etching uniformity: ±5%
- Chamber material: Quartz
Specifications
- Dimensions (W x D x H): 1300 x 1300 x 1800 mm
- Weight: 500 kg
- Operation panel: Touch screen LCD
- Control system: PLC control
- Communication interface: Ethernet
- Safety features: Interlock system, emergency stop button
The KOKUSAI KOMS-A2 is a high-performance etching machine that is ideal for semiconductor device manufacturing. It is built with advanced technology and features that ensure precision, reliability, and efficiency in the etching process. With its unique gas distribution system, quartz chamber, and safety features, the KOMS-A2 is a top-of-the-line solution for semiconductor etching needs.
All prices listed on the official website are subject to confirmation by contact: Wu Jiedong (manager).
Our product: brand new original packaging
Our warranty: All new or repaired parts have a 12 month warranty period beginning
Our payment: 100% telegraphic transfer of inventory items before shipment, conditions can be proposed!
If you have any downtime spare parts that you cannot find, please feel free to call or use email to contact me. If there are issues that the product cannot solve, please contact me. Product prices can be negotiated. Please do not consider contacting me!
